型 号 Model |
ZZS600 | ZZS700 | ZZS800 | ZZS900 | ZZS1100 | ZZS1300 | ZZS1800 | ||
真空室尺寸(直径×高) Size of the vacuum chamber (diameter× height) |
Φ600×750 | Φ710×850 | Φ800×900 | Φ900×1000 | Φ1100×1300 | Φ1300×1300 | Φ1800×2000 | ||
极限真空度 Ultimate vacuum degree |
≤3.0×10-4Pa | ||||||||
恢复真空时间 Time for vacuum recovery |
4.0×10-3Pa≤15min | ||||||||
抽气系统 Pumping system |
扩散泵 Diffusion pump | K-400 | TK-500 |
K-600
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K-630 | TK-500×2 | K-630×2 | K-800×2 | |
罗茨泵 Roots pump | ZJP-150 | ZJP-300 | ZJP-300 | ZJP-1200 | |||||
机械泵 Mechanical pump | 2X-30 | 2X-70 | 2X-70 | 2X-70 | 2X-70 | 2X-70 | 2X-70,H-150×2 | ||
真空测量系统 Vacuum measuring system |
配三路数字复合真空计,两路低真空,一路高真空 Three-way digital compound vacuum gauge, two ways of low vacuum and one of high vacuum |
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操作方式 Operation mode |
手动/自动 Manual/automatic |
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工件夹具 Work piece holder |
Φ600 | Φ640 | Φ750 | Φ840 | Φ1040 | Φ1240 | Φ1720 | ||
工件烘烤系统 Work piece baking system |
上烘烤,铠装管状加热器加热,******温度350℃,PID自动控温及显示 Up baking; heated by sheathed tubular heating element; maximum temperature 350℃; PID automatic temperature control and display. |
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蒸发源 Evaporation source |
电阻蒸发源 Resistance evaporation source |
电阻蒸发源功率4KW(8V、600A) Power of the resistance evaporation source: 4KW (8V, 600A) |
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电子束蒸发源 Electron beam evaporation source |
E型电子束蒸发源,功率6~10KW Power of E-type electron beam evaporation source: 6-10KW |
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膜厚监控系统 Monitoring system on depth of films |
光学膜厚监控,波长范围380-800nm,9o透反射光路,六位电动比较片带显示;石英晶体膜厚监控,美国SQC-310、IC/6 The optical film thickness monitor, a wavelength range of 380-800nm, 9otransflective optical path, six electric comparison sheet with display; quartz crystal thickness monitoring, the United States SQC-310, IC / 6 |
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充气系统 charge systems | 自动压强仪2~510-2Pa Automatic pressure instrument |
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质量流量计:单路单显,双路双显 Mass flow meter: one way one display, dual way dual display |
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离子辅助(选配) Ion-assisted (optional) |
H6霍尔离子源、H10霍尔离子源、Φ12cm考夫曼离子源、Φ16cm考夫曼离子源 H6 Hall ion source, H10 Hall ion source, Φ12cm Kaufman ion source, Φ16cm Kaufman ion source |
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深冷捕集器(选配) Cryogenic trap (optional) |
国产12P、国产15P、进口POLYCOLD550、进口POLYCOLD670 Domestic 12P, 15P, POLYCOLD 550, POLYCOLD 670 |
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动力需求 Power demand |
冷却水 Cooling water |
压力温度 Pressure and temperature |
压力:0.25~0.35MPa;温度≤25℃ Pressure: 0.25-0.35MPa; temperature ≤25℃ |
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流量 Flow rate |
≥50L/min | ≥60L/min | ≥80L/min | ≥100L/min | ≥140L/min | ≥160L/min | ≥180L/min | ||
压缩空气 Compressed air |
压力:0.5~0.7MPa Pressure: 0.5-0.7MPa |
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******消耗电力 Maximum power consumption |
~25KW | ~35KW | ~40KW | ~45KW | ~50KW | ~60KW | ~120KW | ||
设备外形尺寸(宽×深×高) Overall dimension (width×depth×height) |
2100×1800×2000 | 3350×2600×2370 | 3580×3000×2450 | 3870×3600×2670 | 3870×3600×2670 | 3900×4050×2950 | 4400×4000×3600 | ||
设备总重(KG) Gross weight (Kg) |
约1500 About 1,500 |
约2000 About 2,000 |
约2500 About 2,500 |
约3000 About 3,000 |
约3000 About 3,000 |
约4000 About 4,000 |
约6000 About 4,000 |
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