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​GFC系列高性能全自动真空镀膜机
  • 用途及特点
  • 规格参数
    用途及特点
    Use and Features
     
    ●适应于玻璃、塑胶等基片上镀制各类光学薄膜和其它机能性装饰薄膜的批量化生产
    ●采用先进的电气控制系统,良好的用户操作界面,大大减轻作业人员的负担
    ●RCS自动镀膜控制系统保证整个镀膜过程自动完成
    ●基片架转动采用磁流体密封技术保证真空密封,中心驱动方式保证薄膜产品的均匀性及重复性
    ●优化的配置、严格的品质控制保证产品质量的稳定性和重复性
    ●排气速率.镀膜效率的提高,大大缩短了产品生产周期
    GFC系列高性能全自动真空镀膜机
    Series GFC High Quality Vacuum Thin Film Coater
    技术参数
    Technical parameters
    真空室体
    Vacuum chamber
    Ø1300*1450mm,SUS304材质
    φ1,300*1,450mm,SUS304 material
     
    排气系统
    Air exhaust system
    KT-500扩散泵2台,总排气速率(加载水冷阱)11,000Pa.L/S
    Two sets of KT-500 diffusion pump, with a gross exhaust velocity (loaded with water-cooling trap) of 11,000Pa.L/S;
    极限真空≤2.0E-4Pa;排气时间≤15min(大气→4.0E-3Pa)
    Ultimate vacuum ≤2.0E-4Pa; exhaust time ≤15min (atmosphere→4.0E-3Pa)
    基片架
    Substrate holder
    Ø1200四叶扇形基片架, 3~30rpm转速;可选配行星基片架、翻转机构等
    φ1200 four-blade sector-shaped substrate holder, rotating speed 3~30rpm; a planet substrate holder or a turnover mechanism can also be matched;
    加热机构
    Heating means
    ******350℃,PID控制;恒温20min后温度均匀性250±10℃
    Maximum 350℃, PID control; temperature homogeneity being 250±10℃ after 20 min of constant temperature control;
    石英监控仪
    Quartz monitor
    进口石英晶体膜厚监控仪;2点(或6点)晶振探头
    Imported quartz crystal monitor on film depth, with two-point (or six-point) crystal probe;
    电子束蒸发源
    Electron beam evaporation source
    10KW电子*** 2台,12点坩埚和环形坩埚
    Two sets of 10KW electron gun, 12-point crucible or ring-shaped crucible;
    电阻蒸发源
    Resistance evaporation source
    功率4KW(一对、两对或多对)
    Power of 4KW (one pair, two pairs or more pairs)
    膜厚修正板
    Film depth correction board
    2个自动可倒式膜厚修正机构
    Two automatic film depth correction mechanisms of collapsible type
    反应气体
    Reaction gas
    APC自动压强控制仪,质量流量计
    APC automatic pressure controller, mass flowmeter
    离子源
    Ion source
    可选配Kafman、Holl或RF离子源
    Available for matching of Kafman, Holl or RF ion source
    低温抽气装置
    Low temperature evacuating equipment
    进口低温抽气装置有效捕集水蒸汽,******温度-130℃
    The imported low-temperature evacuating equipment can effectively gather water vapor; minimum temperature -130℃
    RCS系统
    RCS system
    基于WINDOWS的全自动镀膜软件
    Windows-based full automatic coating software
    控制系统
    Control system
    控制柜(液晶触摸式彩色显示器),远程控制遥控盒
    Control cabinet (with liquid crystal color touch screen), remote-control box for remote control
     
    消耗能源
    Energy consumption
    3相,220/380VAC,50Hz;~70KVA
    Three-phase, 220/380VAC,50Hz;~70KVA
    水流量140L/min,压力0.3~0.5MPa
    Water flow 140L/min, pressure 0.3~0.5MPa
    压缩空气0.5MPa~0.7MPa
    Compressed air 0.5MPa~0.7MPa
    重    量
    Weight
    净重约4500Kg
    Net weight about 4,500 Kg
    安装空间
    Installation space
    W4000mmxD6000mmxH2700mm
    W4,000mm×D6,000mm×H2,700mm