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​JC系列磁控溅射镀膜机
  • 用途及特点
  • 规格参数
    JC系列用途及特点
    Use and Features
     
    ●磁控溅射镀膜设备主要用于在基片上镀制金属、半导体、电介质、多元素化合物或混和物。利用溅射法可制备金属膜、半导体膜、绝缘膜、硬质膜、耐热膜、耐腐蚀膜、超导膜、磁性膜、光学膜等各种特殊性能的薄膜。
    ●基片尺寸适应范围广,可镀制多种材料,工艺可控性好、灵活性强、重复性高、基片温升小、膜层附着力强,计算机全自动控制,可靠性高。且安装维护方便,占地位置小。
    JC系列磁控溅射镀膜机
    Series JC Magnetron Sputtering Coater
     
    主要机型及参数
    Main models and parameters
    型号
    Model
    应用特点
    Application field
    装片工作台特点
    Features of film loading bench
    基片尺寸
    Size of substrate
    产量/每小时
    1μ铝层厚度
    Output per hour 1μm aluminum coating thickness
    厚度
    均匀性
    thickness homogeneity
    真空系统
    Vacuum system
    JC400-1/D 适合科研、生产硅片及***化镓片
    Scientific research,production of silicon film and gallium arsenide film
    全自动盒对盒送片,溅射源数量可按工艺调整,低尘粒
    Full automatic box-to-box film advance;quantity of sputtering source to be adiusted as per the process;low in density of dust particles
    4~6″ 40 ±5% 低温泵加
    分子泵系统
    Cryogenic pump system added with molecular pump
    JC500-1/D 适用于圆形片状工件
    Circular sheet work-piece
    工件可进行公转,水平装片
    Revolution of work-piece available;horizontal film loading
    4″ 16 ±8% 分子泵系统
    Turbomolecular pump system
    JC500-5/D 适用于矩形片状工件
    Rectangular sheet work-piecevv
    工件可进行公转,垂直装片
    Revolution of work-piece available;vertical film loading
    150x150mm 10 ±8% 分子泵系统
    Turbomolecular pump system
    JC600-1/D 适用于矩形片状工件
    Rectangular sheet work-piecevv
    工件架为十边拄形,垂直装片
    work-piece holder in decagonal column shape;vertical film loading
    280x100mm 20 ±8% 扩散泵系统
    Diffusion pump system
    JC600-2/D 适合科研、生产***化镓基片线宽亚微米级
    Scientific research,production of gallium arsenide film with line width at submicron level
    工件可进行自传、公转
    水平装片
    Rotation and revolution of work-piece available;horizontal film loading
    3″ 24 ±5% 低温泵系统
    Cryogenic pump system
    JC650-1/D 适用于矩形或圆形片状工件
    Rectangular or circular sheet work-piece
    工件可进行公转,水平装片
    revolution of work-piece available;horizontal film loading
    Φ100mm 10 ±5% 分子泵系统
    Turbomolecular pump system