- Material loading and positioning: This is used to place the membrane material (such as metal or compound) to be evaporated, and through the mechanical transmission system, the position of the crucible is adjusted to ensure that the electron beam precisely hits the target area.
- Non-contact heating support: By guiding the electron beam to bombard the material inside the crucible through a magnetic field, local high-temperature vaporization (up to 3000°C or above) is achieved, avoiding the problem of crucible contamination caused by traditional resistance heating.
- Heat management: The water-cooled copper crucible design can quickly dissipate heat, prevent the crucible from overheating and deforming, and maintain the stability of the material evaporation process.
- Main application fields
- - Metallurgical industry
- - Chemical field
- - Mechanical manufacturing
- - Electronic technology
- Product Features
-
- ● The RK GGC-D10 crucible drive system is an external drive system;
- ● The entire device is divided into the crucible water-cooling part and the drive part (as shown in the figure); the two parts are structurally modular and form two separate units, which are particularly convenient and simple for installation, disassembly, maintenance, and repair.
- ● It can support any acupuncture point under actual circumstances;
- ● It meets the interchangeability of the dynamic seal of the drive shaft and the magnetic fluid seal, and can be selected arbitrarily;
- ● The crucible can be removed from the vacuum chamber body from above, which is convenient for cleaning and maintenance;
- ● The strong torque effectively prevents the occurrence of step loss in the stepper motor.
Technical Parameters
● Installation conditions: Vertical installation; The opening on the bottom plate of the vacuum chamber is φ40mm to φ60mm;
● Utilizing a deceleration motor drive: The decelerator has a reduction ratio of 1:32, and the motor is a stepper motor;
● Transmission method: Center spindle drive;
● Cooling water flow rate: 10L/min to 20L/min (water temperature should be between 15℃ and 25℃);
● Rotational torque: 74 Nm.
