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Series GFC High Quality Vacuum Thin Film Coater
  • Uses and features
  • Specification parameter
    Use and Features
     
    ●Applicable to coating of various optical films on glass, plastics and other substrates as well as to batch production of mechanical decorating films;
    ●Arranged with advanced electrical control system and favorable user interface that have substantially reduced workload of the operator;
    ●Arranged with RCS automatic control system for coating can ensure automation of the whole coating process;
    ●Rotation of the substrate holder is accompanied by magnetic fluid sealing for ensuring vacuum tightness while the central driving mode has ensured homogeneity and repeatability of films;
    ●Optimized configurations and strict quality control have guaranteed stability and repeatability of products;
    ●Improvement of air exhaust velocity and coating efficiency has greatly shortened production period;
    GFC系列高性能全自动真空镀膜机
    Series GFC High Quality Vacuum Thin Film Coater
    技术参数
    Technical parameters
    真空室体
    Vacuum chamber
    Ø1300*1450mm,SUS304材质
    φ1,300*1,450mm,SUS304 material
     
    排气系统
    Air exhaust system
    KT-500扩散泵2台,总排气速率(加载水冷阱)11,000Pa.L/S
    Two sets of KT-500 diffusion pump, with a gross exhaust velocity (loaded with water-cooling trap) of 11,000Pa.L/S;
    极限真空≤2.0E-4Pa;排气时间≤15min(大气→4.0E-3Pa)
    Ultimate vacuum ≤2.0E-4Pa; exhaust time ≤15min (atmosphere→4.0E-3Pa)
    基片架
    Substrate holder
    Ø1200四叶扇形基片架, 3~30rpm转速;可选配行星基片架、翻转机构等
    φ1200 four-blade sector-shaped substrate holder, rotating speed 3~30rpm; a planet substrate holder or a turnover mechanism can also be matched;
    加热机构
    Heating means
    ******350℃,PID控制;恒温20min后温度均匀性250±10℃
    Maximum 350℃, PID control; temperature homogeneity being 250±10℃ after 20 min of constant temperature control;
    石英监控仪
    Quartz monitor
    进口石英晶体膜厚监控仪;2点(或6点)晶振探头
    Imported quartz crystal monitor on film depth, with two-point (or six-point) crystal probe;
    电子束蒸发源
    Electron beam evaporation source
    10KW电子*** 2台,12点坩埚和环形坩埚
    Two sets of 10KW electron gun, 12-point crucible or ring-shaped crucible;
    电阻蒸发源
    Resistance evaporation source
    功率4KW(一对、两对或多对)
    Power of 4KW (one pair, two pairs or more pairs)
    膜厚修正板
    Film depth correction board
    2个自动可倒式膜厚修正机构
    Two automatic film depth correction mechanisms of collapsible type
    反应气体
    Reaction gas
    APC自动压强控制仪,质量流量计
    APC automatic pressure controller, mass flowmeter
    离子源
    Ion source
    可选配Kafman、Holl或RF离子源
    Available for matching of Kafman, Holl or RF ion source
    低温抽气装置
    Low temperature evacuating equipment
    进口低温抽气装置有效捕集水蒸汽,******温度-130℃
    The imported low-temperature evacuating equipment can effectively gather water vapor; minimum temperature -130℃
    RCS系统
    RCS system
    基于WINDOWS的全自动镀膜软件
    Windows-based full automatic coating software
    控制系统
    Control system
    控制柜(液晶触摸式彩色显示器),远程控制遥控盒
    Control cabinet (with liquid crystal color touch screen), remote-control box for remote control
     
    消耗能源
    Energy consumption
    3相,220/380VAC,50Hz;~70KVA
    Three-phase, 220/380VAC,50Hz;~70KVA
    水流量140L/min,压力0.3~0.5MPa
    Water flow 140L/min, pressure 0.3~0.5MPa
    压缩空气0.5MPa~0.7MPa
    Compressed air 0.5MPa~0.7MPa
    重    量
    Weight
    净重约4500Kg
    Net weight about 4,500 Kg
    安装空间
    Installation space
    W4000mmxD6000mmxH2700mm
    W4,000mm×D6,000mm×H2,700mm