| 项目/Item |
内容/ content |
真空容器尺寸
Vacuum container size |
φ1600×2000mm（SUS304不锈钢）
φ1600×2000mm （SUS304 stainless steel） |
夹具转轴旋转直径、数量、长度
Fixture shaft rotation diameter, number, length |
6/8轴φ440 L=1700 |
真空度指标
Vacuum index |
1）极限真空度（常温、空载、洁净条件）：≤3.0×10-4Pa
Ultimate vacuum(Room temperature, no-load, clean conditions)：≤3.0×10-4Pa
2）恢复真空：从大气抽至2.0×10-2 Pa≤7分钟（空载）
Recovery vacuum：From the atmosphere 2.0×10-2 Pa≤7Minutes（no-load）
3）抽气速率/ Pumping rate：≥25000L/S
4）静态漏率/ Static leakage rate: ＜5×10-3 Pa/S
5）回填大气时间/ Backfill atmospheric time: ＜2 min |
蒸发源
Evaporation source |
1) 电阻加热式，功率≥30kwAC6～12V可调；利用可控硅调（SCR）压模块控制或变压器。
Resistance heating type, power ≥ 30kw AC6 ~ 12V adjustable; using thyristor modulation (SCR) pressure module control or transformer.
2）蒸发电极：钨丝，安装数量17～24组/套。
Evaporation electrode: tungsten wire, installation number 17-24 units/ sets. |
硅油保护膜重合
Silicon oil protective film overlap |
1）硅油储存罐及填充管道材质：SUS304不锈钢。
Silicone oil storage tank and filled pipe material: SUS304 stainless steel.
2）硅油储存罐容积：容积≥20L。有目视和液位计，加热器、温度传感器，保持在设定的恒温状态,温度******为50度。
Silicon oil storage tank volume: ≥ 20L. There are visual and level gauges, heaters, and temperature sensors that are kept at the set constant temperature, and the temperature is up to 50 degrees.
3）硅油储存罐设有观察窗。
Silicon oil storage tanks have observation windows.
4）DC等离子重合方式，DC0～6000V ，0～2A可调。
DC plasma overlap method, DC0 ~ 6000V, 0 ~ 2A adjustable. |
硅油流量控制
Silicon oil flow control |
采用针型阀控制/ Using needle valve control |
Ar填充系统
Ar filling system |
1） 填充管道： SUS304不锈钢；
Filled pipe: SUS304 stainless steel;
2） 质量流量控制器；
Mass flow controller |
装机功率
Installed power |
～100KW |
Company Website
Online Mall