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Series ZZS Box-type Vacuum Coating Machine
- Uses and features
- Specification parameter
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Brief introduction
After near 40 years of development, ZZS box-type vacuum coating machine by Rankuum Machinery has formed into a series with size of the vacuum coating chamber varying from 500mm to 3,600mm, and presently, an ideal series for coating of multi-layer optical and electrical thin-films that is widely used in scientific research or mass production by enterprises, research institutions, colleges and tertiary institutions.
Product features
This product has a box-type structure and rear-mounted vacuum system for convenience of operation and maintenance as well as a flattened surface for convenience of cleaning, thus especially suitable for installation in the wall of a clean room.
The vacuum system is characterized as high in pumping speed and vacuum degree and short in pumping time and production period.
A tubular heating element is employed for equal baking, an element with a long service time capable to render a maximum temperature of 350℃ and a homogeneity of 270℃±10℃.
Workpiece rotation, driven by the upper center and provided with water-cooling for the bearing strip and sealing with magnetic fluid, is smooth and reliable.
A controller on depth of quartz crystal films is employed to realize automatic control throughout the coating procedure.
The advanced coating control system with a nice and practical human-machine interface is stable and reliable, allowing manual, semi-automatic and full automatic operation.
Scope of application
This machine is applicable to production of IR-CUT filter plate, color separation filter, high-reflection film, AR film, long-wave pass, short-wave pass and various kinds of electrical film.
Standard configurations for common use
Specified in the following table are configurations and indices of our five standard models commonly used. Over years, our company has developed series of box-type vacuum coating machine sized at 350mm, 450mm,500mm, 550mm, 630mm, 700mm, 800mm, 900mm, 1100mm, 1,250mm, 1,300mm, 1,500mm, 1,800mm, 2,200mm and 2,500mm, 3,600mm. Furthermore, our company can, upon request of vast customers, provide customized manufacturing of vacuum coating machine of various forms, including special customization of vacuum chamber size, vacuum system configuration, work holder system, workpiece baking system, monitoring system on film depth, evaporation system, inflation system, ion source system and electrical control system.
ZZS系列箱式真空镀膜机
Series ZZS Box-type Vacuum Coating Machine
常用标准配置表
Standard configurations for common use
Series ZZS Box-type Vacuum Coating Machine
常用标准配置表
Standard configurations for common use
| 型 号 Model |
ZZS600 | ZZS700 | ZZS800 | ZZS900 | ZZS1100 | ZZS1300 | ZZS1800 | ||
| 真空室尺寸(直径×高) Size of the vacuum chamber (diameter× height) |
Φ600×750 | Φ710×850 | Φ800×900 | Φ900×1000 | Φ1100×1300 | Φ1300×1300 | Φ1800×2000 | ||
| 极限真空度 Ultimate vacuum degree |
≤3.0×10-4Pa | ||||||||
| 恢复真空时间 Time for vacuum recovery |
4.0×10-3Pa≤15min | ||||||||
| 抽气系统 Pumping system |
扩散泵 Diffusion pump | K-400 | TK-500 | K-600 | K-630 | TK-500×2 | K-630×2 | K-800×2 | |
| 罗茨泵 Roots pump | ZJP-150 | ZJP-300 | ZJP-300 | ZJP-1200 | |||||
| 机械泵 Mechanical pump | 2X-30 | 2X-70 | 2X-70 | 2X-70 | 2X-70 | 2X-70 | 2X-70，H-150×2 | ||
| 真空测量系统 Vacuum measuring system |
配三路数字复合真空计，两路低真空，一路高真空 Three-way digital compound vacuum gauge, two ways of low vacuum and one of high vacuum |
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| 操作方式 Operation mode |
手动/自动 Manual/automatic |
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| 工件夹具 Work piece holder |
Φ600 | Φ640 | Φ750 | Φ840 | Φ1040 | Φ1240 | Φ1720 | ||
| 工件烘烤系统 Work piece baking system |
上烘烤，铠装管状加热器加热，******温度350℃，PID自动控温及显示 Up baking; heated by sheathed tubular heating element; maximum temperature 350℃; PID automatic temperature control and display. |
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| 蒸发源 Evaporation source |
电阻蒸发源 Resistance evaporation source |
电阻蒸发源功率4KW（8V、600A） Power of the resistance evaporation source: 4KW (8V, 600A) |
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| 电子束蒸发源 Electron beam evaporation source |
E型电子束蒸发源，功率6～10KW Power of E-type electron beam evaporation source: 6-10KW |
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| 膜厚监控系统 Monitoring system on depth of films |
光学膜厚监控，波长范围380-800nm，9ｏ透反射光路，六位电动比较片带显示；石英晶体膜厚监控，美国SQC-310、IC/6 The optical film thickness monitor, a wavelength range of 380-800nm, 9ｏtransflective optical path, six electric comparison sheet with display; quartz crystal thickness monitoring, the United States SQC-310, IC / 6 |
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| 充气系统 charge systems | 自动压强仪2～510-2Pa Automatic pressure instrument |
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| 质量流量计：单路单显，双路双显 Mass flow meter: one way one display, dual way dual display |
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| 离子辅助（选配） Ion-assisted (optional) |
H6霍尔离子源、H10霍尔离子源、Φ12cm考夫曼离子源、Φ16cm考夫曼离子源 H6 Hall ion source, H10 Hall ion source, Φ12cm Kaufman ion source, Φ16cm Kaufman ion source |
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| 深冷捕集器（选配） Cryogenic trap (optional) |
国产12P、国产15P、进口POLYCOLD550、进口POLYCOLD670 Domestic 12P, 15P, POLYCOLD 550, POLYCOLD 670 |
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| 动力需求 Power demand |
冷却水 Cooling water |
压力温度 Pressure and temperature |
压力：0.25～0.35MPa；温度≤25℃ Pressure: 0.25-0.35MPa; temperature ≤25℃ |
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| 流量 Flow rate |
≥50L/min | ≥60L/min | ≥80L/min | ≥100L/min | ≥140L/min | ≥160L/min | ≥180L/min | ||
| 压缩空气 Compressed air |
压力：0.5～0.7MPa Pressure: 0.5-0.7MPa |
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| ******消耗电力 Maximum power consumption |
～25KW | ～35KW | ～40KW | ～45KW | ～50KW | ～60KW | ～120KW | ||
| 设备外形尺寸（宽×深×高） Overall dimension (width×depth×height) |
2100×1800×2000 | 3350×2600×2370 | 3580×3000×2450 | 3870×3600×2670 | 3870×3600×2670 | 3900×4050×2950 | 4400×4000×3600 | ||
| 设备总重（KG） Gross weight (Kg) |
约1500 About 1,500 |
约2000 About 2,000 |
约2500 About 2,500 |
约3000 About 3,000 |
约3000 About 3,000 |
约4000 About 4,000 |
约6000 About 4,000 |
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